1. Data sheet for Ion source IQ 10/35, SPECS, GmbH (1996)
2. C.T. Campbell, S.M. Valone, J. Vac. Sci. Technol. A3, 408 (1985)
3. A. Winkler, J.T. Yates Jr, J. Vac. Sci. Technol. A6, 2929 (1989)
4. Design provided by Dr. J. Ahner and D. Mocuta, Surface Science Center, University of Pittsburgh
5. T. McCabe, J. Somers, M.E. Bridge, D.R. Lloyd, J. Vac. Sci. Technol. A5, 119 (1987)