Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode
Author:
Affiliation:
1. School of Advanced Materials, Peking University Shenzhen Graduate School, Shenzhen 518055, China
2. Department of Physics and Department of Materials Science and Engineering, City University of Hong Kong, Kowloon, Hong Kong, China
Funder
City University of Hong Kong Strategic Research Grant
Guangdong Science and Technology Research Grants
Hong Kong Research Grants Council
Shenzhen Science and Technology Research Grants
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5048554
Reference51 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
2. Plasma dynamics in a highly ionized pulsed magnetron discharge
3. On the electron energy in the high power impulse magnetron sputtering discharge
4. Ionization of sputtered metals in high power pulsed magnetron sputtering
5. Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer
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