On the electron energy in the high power impulse magnetron sputtering discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3151953
Reference21 articles.
1. Ionized physical vapor deposition (IPVD): A review of technology and applications
2. Ionized physical vapor deposition (IPVD): magnetron sputtering discharges
3. A novel pulsed magnetron sputter technique utilizing very high target power densities
4. Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
5. Spatial electron density distribution in a high-power pulsed magnetron discharge
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