Plasma dynamics in a highly ionized pulsed magnetron discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference20 articles.
1. Spatial survey of a magnetron plasma sputtering system using a Langmuir probe
2. Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures
3. Metal ion deposition from ionized mangetron sputtering discharge
4. Hollow‐cathode‐enhanced magnetron sputtering
5. A novel pulsed magnetron sputter technique utilizing very high target power densities
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