Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3125443
Reference37 articles.
1. Influence of high power densities on the composition of pulsed magnetron plasmas
2. Spatial electron density distribution in a high-power pulsed magnetron discharge
3. The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
4. Measurement of ionic and neutral densities in amplified magnetron discharges by pulsed absorption spectroscopy
5. Target material pathways model for high power pulsed magnetron sputtering
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Recent advances and strategies for high-performance coatings;Progress in Materials Science;2023-07
2. Evidence of 1000 eV positive oxygen ion flux generated in reactive HiPIMS plasma;Plasma Sources Science and Technology;2023-06-01
3. Parameters and ion mass-to-charge composition of a high-power impulse magnetron discharge with electron injection;Vacuum;2022-06
4. Combined Processing of Micro Cutters Using a Beam of Fast Argon Atoms in Plasma;Coatings;2021-04-16
5. Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS;Applied Surface Science;2020-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3