Heating mode transition in a hybrid direct current/dual-frequency capacitively coupledCF4discharge
Author:
Funder
NNSFC
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4882297
Reference31 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Plasma Electronics
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4. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
5. Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method
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