Breakdown modes of capacitively coupled plasma: I. Transitions from glow discharge to multipactor

Abstract

Abstract This paper is the first in a two-part series that simulates the breakdown modes of capacitively coupled plasmas (CCPs) across various pressures using an implicit particle-in-cell/Monte Carlo collision model. The study identifies several discharge modes in the lower pressure region, including three self-sustained discharges: glow discharge, normal multipactor, and abnormal multipactor, as well as various non-self-sustained discharges. This part focuses on the formation and transitions of self-sustained modes, specifically detailing how the glow discharge transitions into an abnormal multipactor below 2 mTorr, which then evolves into a normal multipactor within a narrow voltage range. The characteristics and formation processes of these self-sustained discharges are explored, emphasizing their reliance on higher electron emission rates and high-frequency RF power. The emergence of multipactor discharges in the 60 MHz range potentially expands the gas discharge theory and broadens the application scope of CCPs.