Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas-Reference-Cited by-同舟云学术

Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Published:1999-12-20 Issue:25 Volume:75 Page:3929-3931
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Takashima Seigou,Hori Masaru,Goto Toshio,Kono Akihiro,Ito Masafumi,Yoneda Katsumi

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.125497

Reference5 articles.

1. Detection of H Atoms in RF-DischargeSiH4,CH4andH2Plasmas by Two-Photon Absorption Laser-Induced Fluorescence Spectroscopy

2. Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations

3. Experimental and theoretical study of dissociation in the positive column of a hydrogen glow discharge

4. Laser‐induced dissociation of molecules during measurements of hydrogen atoms in processing plasmas using two‐photon laser‐induced fluorescence

5. The electron energy dependence of the doppler profiles of the Balmer-α emission from H2, D2, CH4 and other simple hydrocarbons by electron impact

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