High-speed hydrophilic and ashing treatments of polyimide using Ar/O2 atmospheric-pressure microwave line plasma

Abstract

Abstract The performance of a newly-developed 1D-long atmospheric-pressure microwave plasma, i.e. atmospheric-pressure microwave line plasma (APMLP), is demonstrated. Using vacuum ultraviolet atomic absorption spectroscopy, spatially uniform oxygen radical density along a 50 cm length is observed. With the APMLP using Ar/O2 gas, very fast hydrophilic treatment of polyimide (PI) film within 20 ms is obtained. Using looped-waveguide-type APMLP, fast ashing treatment of PI film at an ashing rate of 20 μm min−1 is demonstrated.