Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials
Author:
Affiliation:
1. imec, Kapeldreef 75, 3001 Leuven, Belgium
2. Department of Materials Engineering, KU Leuven, 3000 Leuven, Belgium
Funder
imec
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4934520
Reference37 articles.
1. Dielectric Films for Advanced Microelectronics
2. Low dielectric constant materials for microelectronics
3. Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-kto extreme low-kinterconnect materials
4. Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus
5. Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Damage to OSG low‐ k films during IPVD deposition of the Ta barrier layer;Plasma Processes and Polymers;2022-12-22
2. Development of a multifunctional nanoindenter integrated in-situ Scanning Electron Microscope - application to the monitoring of piezoresponse and electro-mechanical failures;Thin Solid Films;2021-10
3. Exact statistical solution for the hopping transport of trapped charge via finite Markov jump processes;Scientific Reports;2021-05-13
4. Charging Compensation Layer on Polyimide for Enhanced Device Stability in Flexible Technology;Electronic Materials Letters;2021-02-10
5. Charge Transport Mechanism and Trap Origin in Methyl‐Terminated Organosilicate Glass Low‐κ Dielectrics;physica status solidi (a);2020-12-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3