Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus

Published:2013-09-16 Issue:38 Volume:29 Page:12025-12035
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Vanstreels Kris¹,Wu Chen¹²,Gonzalez Mario¹,Schneider Dieter³,Gidley David⁴,Verdonck Patrick¹,Baklanov Mikhail R.¹

Affiliation:

1. imec, Kapeldreef 75, 3001 Leuven, Belgium

2. Katholieke Universiteit Leuven, 3000 Leuven, Belgium

3. Fraunhofer Institute for Materials and Beam Technology, Winterbergstraße 28, 01277 Dresden, Germany

4. Department of Physics, University of Michigan, Ann Arbor, Michigan 48109-1040, United States

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la402383g

Reference49 articles.

1. Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition

2. Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials

3. Elastic properties of porous low-k dielectric nano-films

4. Mechanical properties of high porosity low-kdielectric nano-films determined by Brillouin light scattering

5. The effect of water uptake on the mechanical properties of low-k organosilicate glass

Cited by 46 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluation of the abilities of atomic oxygen/ultraviolet resistance for the filled silicone rubber coating: Structures, properties, and aging mechanism;Surface and Coatings Technology;2024-04

2. Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves;physica status solidi (a);2024-02-20

3. Structural and Luminescence Properties of Eu-Doped PMO Films with Ethylene Bridge and Methyl Terminal Groups;Coatings;2023-09-21

4. Anomalous effect of nitrogen flow ratio on mechanical properties of NbMoTaW:(N,O) medium entropy alloy films;Vacuum;2023-09

5. Challenges in porosity characterization of thin films: Cross-evaluation of different techniques;Journal of Vacuum Science & Technology A;2023-07-20

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3