Spatial resolution of the capacitance‐voltage profiling technique on semiconductors with quantum confinement
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103632
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1. On the Measurement of Impurity Atom Distributions in Silicon by the Differential Capacitance Technique
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3. Measurement of isotype heterojunction barriers byC‐Vprofiling
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