Measurement of ion energy distributions using a combined energy and mass analyzer
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2769352
Reference17 articles.
1. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
2. Interpretation of ion distribution functions measured by a combined energy and mass analyzer
3. Flow of Ions Through a Small Orifice in a Charged Plate
4. A quantitative analysis of ion-molecule reactions occurring within the extraction orifice of a mass-spectrometric sampling probe
5. Pressure Considerations Associated with Ion Sampling from Glow Discharges
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