Depth sectioning of individual dopant atoms with aberration-corrected scanning transmission electron microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference16 articles.
1. Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si
2. Sub-ångstrom resolution using aberration corrected electron optics
3. Image Formation in the Scanning Microscope
4. Prospects for 3D, nanometer-resolution imaging by confocal STEM
5. Confocal operation of a transmission electron microscope with two aberration correctors
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