3D Sectioning of Rough Interfaces Using Mixed-State Multislice Ptychography, Annular Dark Field, and Integrated Differential Phase Contrast Imaging
Author:
Affiliation:
1. School of Applied and Engineering Physics, Cornell University , Ithaca, NY , United States
2. Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu , Taiwan
Publisher
Oxford University Press (OUP)
Subject
Instrumentation
Link
https://academic.oup.com/mam/article-pdf/29/Supplement_1/288/50932027/ozad067.133.pdf
Reference6 articles.
1. Depth sectioning of individual dopant atoms with aberration-corrected scanning transmission electron microscopy
2. The abTEM code: transmission electron microscopy from first principles
3. Electron ptychography achieves atomic-resolution limits set by lattice vibrations
4. Towards quantitative, atomic-resolution reconstruction of the electrostatic potential via differential phase contrast using electrons
5. High Dynamic Range Pixel Array Detector for Scanning Transmission Electron Microscopy
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