Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Abstract

Locating atoms with higher precision Two major problems that limit the resolution and interpretation of electron microscopy images are lens aberrations and multiple scattering. Chen et al. overcame these issues with ptychography, a technique that uses coherent scattering and multiple overlapping illumination spots to reconstruct an image from far-field diffraction patterns. This method works at a resolution that is limited, not by optics, but rather by the scattering strength of the sample, so it can work better with thicker samples. The authors achieved ultimate lateral resolution better than the thermal vibration of atoms in a PrScO 3 sample and showed that it is theoretically possible to identify single dopant atoms. Science , abg2533, this issue p. 826