Hafnium oxide gate dielectrics on sulfur-passivated germanium
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2338751
Reference32 articles.
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2. HfO2 and Al2O3 gate dielectrics on GaAs grown by atomic layer deposition
3. Methodology for Development of High-κ Stacked Gate Dielectrics on III–V Semiconductors
4. High-κ gate dielectrics: Current status and materials properties considerations
5. High dielectric constant oxides
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