Detection of defects at homoepitaxial interface by deep‐level transient spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359372
Reference5 articles.
1. Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE
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3. Carbon-Related Defects in Si:C/Silicon Heterostructures Assessed by Deep-Level Transient Spectroscopy;ECS Journal of Solid State Science and Technology;2017
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