Impurity profiles of GaAs epitaxial layers doped with Sn, Si, and Ge grown with molecular beam epitaxy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.321777
Reference9 articles.
1. Film Deposition by Molecular-Beam Techniques
2. Growth of Periodic Structures by the Molecular‐Beam Method
3. The Growth of a GaAs–GaAlAs Superlattice
4. Interface and doping profile characteristics with molecular‐beam epitaxy of GaAs: GaAs voltage varactor
5. Properties of Schottky barriers and p‐n junctions prepared with GaAs and Alx Ga1−x As molecular beam epitaxial layers
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