Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2828154
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1. Molybdenum Gate Technology for Ultrathin-Body MOSFETs and FinFETs
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