Review Article: Reactions of fluorine atoms with silicon, revisited, again
Author:
Affiliation:
1. Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204
Funder
U.S. Department of Energy (DOE)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4983922
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