Dopant mapping in highly p-doped silicon by micro-Raman spectroscopy at various injection levels
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4773110
Reference22 articles.
1. Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
2. Highly p-doped regions in silicon solar cells quantitatively analyzed by small angle beveling and micro-Raman spectroscopy
3. Anodic Dissolution during Electrochemical Carrier‐Concentration Profiling of Silicon
4. Laser structuring of crystalline silicon thin-film solar cells on opaque foreign substrates
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