Energetic neutrals in the cathode sheath of argon direct-current discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3160329
Reference21 articles.
1. Ion Energies at the Cathode of a Glow Discharge
2. Energy spectra of particles bombarding the cathode in glow discharges
3. Ion energy distribution and gas heating in the cathode fall of a direct-current microdischarge
4. The characteristics of the ion and neutral fluxes incident on the substrate in an ion plating discharge
5. On the production of energetic neutrals in the cathode sheath of direct-current discharges
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2. Influence of a cathode surface oxide film on the energy distributions of ions and fast atoms in a glow discharge;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2015-03
3. Calculation of ion and fast atom contributions to the sputtering non-uniformity of the target with a surface relief in glow discharge;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-03
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