On the production of energetic neutrals in the cathode sheath of direct-current discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2711416
Reference18 articles.
1. Ion Energies at the Cathode of a Glow Discharge
2. Energy spectra of particles bombarding the cathode in glow discharges
3. Ion energy distribution and gas heating in the cathode fall of a direct-current microdischarge
4. The characteristics of the ion and neutral fluxes incident on the substrate in an ion plating discharge
5. Energy distributions of particles striking the cathode in a glow discharge
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