The characteristics of the ion and neutral fluxes incident on the substrate in an ion plating discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. Interface broadening during ion plating
2. Basic Data of Plasma Physics,1966
3. Effect of Space Charge in Cold-Cathode Gas Discharges
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