Energy spectra of particles bombarding the cathode in glow discharges
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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1. Child–Langmuir law applicability for a cathode sheath description of glow discharge in hydrogen;Physica Scripta;2016-07-14
2. Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-07
3. Plasmas in Deposition Processes;Handbook of Deposition Technologies for Films and Coatings;2010
4. Energetic neutrals in the cathode sheath of argon direct-current discharges;Journal of Applied Physics;2009-07-15
5. Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges;Plasma Sources Science and Technology;2009-07-15
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