Plasmas in Deposition Processes
Author:
Publisher
Elsevier
Reference152 articles.
1. Deposition Technologies for Films and Coatings;Thornton,1994
2. Determination of the absolute partial and total cross sections for electron-impact ionization of the rare gases
3. Total cross sections for metastable excitation in the rare gases
4. Relativistic electron-beam-produced plasmas. I. Collision cross sections and loss function in argon
5. Electron-impact excitation of electronic states in argon at incident energies between 16 and 100 eV
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