rf modulation of positive‐ion energies in low‐pressure discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347011
Reference11 articles.
1. Ion and electron energy analysis at a surface in an RF discharge
2. An electrostatic probe technique for RF plasma
3. Techniques for using emitting probes for potential measurement in rf plasmas
4. Calculation of Ion Bombarding Energy and Its Distribution in rf Sputtering
5. Distribution of ion energies incident on electrodes in capacitively coupled rf discharges
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