Calculation of Ion Bombarding Energy and Its Distribution in rf Sputtering
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRev.168.107/fulltext
Reference17 articles.
1. Sputtering of Dielectrics by High‐Frequency Fields
2. Sputtering Studies of Insulators by Means of Langmuir Probes
3. Dielectric Thin Films through rf Sputtering
4. Plasma Sheath Formation by Radio-Frequency Fields
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