Control of ions energy distribution in dual-frequency magnetron sputtering discharges
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4873401
Reference32 articles.
1. Structured Ti/Hydrocarbon Plasma Polymer Nanocomposites Produced By Magnetron Sputtering with Glancing Angle Deposition
2. Ultrathin Fluoropolymer Films Deposited on a Polyimide (Kapton®) Surface by RF Magnetron Sputtering of Poly(tetrafluoroethylene)
3. Structure Control in Reactively Sputtered Ag/Cu/(Mn)/O Films
4. In Situ Diagnostics of RF Magnetron Sputtering of Nylon
5. Calculation of Ion Bombarding Energy and Its Distribution in rf Sputtering
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