A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms-Reference-Cited by-同舟云学术

A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms

Published:2016-10-28 Issue:4-5 Volume:14 Page:1600117
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Schüngel Edmund¹²,Donkó Zoltán³,Schulze Julian¹⁴

Affiliation:

1. Department of Physics; West Virginia University; Morgantown West Virginia 26506-6315 USA

2. Evatec AG; Hauptstrasse 1a; Trübbach CH-9477 Switzerland

3. Wigner Research Centre for Physics; Institute for Solid State Physics and Optics; Hungarian Academy of Sciences; Konkoly-Thege Miklós str. 29-33 Budapest 1121 Hungary

4. Institute for Electrical Engineering; Ruhr-University Bochum; Bochum 44780 Germany

Funder

NKFIH

DFG (German Research Foundation)

US National Science Foundation

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201600117/fullpdf

Reference64 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Industrial plasmas in academia

4. Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

5. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

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