Computer simulation of high speed melting of amorphous silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94440
Reference14 articles.
1. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
2. Laser annealing of boron‐implanted silicon
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4. A melting model for pulsing‐laser annealing of implanted semiconductors
5. Theoretical and experimental investigation of the dynamics of pulsed laser annealing of amorphous silicon
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