Correlation of the structure and electrical properties of ion‐implanted and laser‐annealed silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91575
Reference17 articles.
1. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
2. Laser annealing of boron‐implanted silicon
3. A laser‐scanning apparatus for annealing of ion‐implantation damage in semiconductors
4. Time‐resolved reflectivity of ion‐implanted silicon during laser annealing
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