The interdiffusion of Si, P, and In at polysilicon/GaAs interfaces
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341760
Reference40 articles.
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4. Diffusion in III-V semiconductors from spin-on-film sources
5. Backscattering analysis of electron‐beam‐induced diffusion of tin in GaAs from dopant emulsions
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