Determination of negative ion density with optical emission spectroscopy in oxygen afterglow plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121394
Reference12 articles.
1. Charge‐free etching process using positive and negative ions in pulse‐time modulated electron cyclotron resonance plasma with low‐frequency bias
2. Detection of Negative Ions in a Helium-Silane RF Plasma
3. Plasmas with negative ions-probe measurements and charge equilibrium
4. Enhancement of the negative ion flux to surfaces from radio‐frequency processing discharges
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microwave Plasma Systems for Plasma Processing at Reduced Pressures;Microwave Plasma Sources and Methods in Processing Technology;2022-02-10
2. Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature;Carbon;2020-12
3. Complex transients of input power and electron density in pulsed inductively coupled discharges;Journal of Applied Physics;2019-09-07
4. Aspect ratio dependence of silicon trench oxidation in downstream of microwave oxygen plasma;Japanese Journal of Applied Physics;2019-01-01
5. Forming perchlorates on Mars through plasma chemistry during dust events;Earth and Planetary Science Letters;2018-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3