Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas-Reference-Cited by-同舟云学术

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Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas

Published:2017-12 Issue:12 Volume:24 Page:123502
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Seo Byonghoon¹,Kim Dae-Woong²,Kim Jung-Hyung³,You Shinjae⁴^ORCID

Affiliation:

1. Applied Physics and Materials Science, Caltech, Pasadena, California 91125, USA

2. Korea Institute of Machinery and Materials, Daejeon 34103, South Korea

3. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea

4. Department of Physics, Chungnam National University, Daejeon 34134, South Korea

Funder

Korea Research Institute of Standards and Science

Ministry of Science, ICT and Future Planning

Ministry of Trade, Industry and Energy

National Research Council of Science and Technology

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4996220

Reference20 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Comparative studies of the laser Thomson scattering and Langmuir probe methods for measurements of negative ion density in a glow discharge plasma

3. Plasma diagnostics by optical emission spectroscopy on argon and comparison with Thomson scattering

4. Measurements of Electron Energy Probability Functions in inductively coupled plasma with laser Thomson scattering

5. Computational comparative study of microwave probes for plasma density measurement

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma;Applied Science and Convergence Technology;2023-09-12

2. Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process;Sensors;2023-02-24

3. Analysis on crossing frequency in transmission microwave frequency spectrum of the cutoff probe;Physics of Plasmas;2023-02-01

4. Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics;Sensors;2022-07-22

5. An electrostatic model of the cutoff probe;Current Applied Physics;2022-07

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