Measurements of Electron Energy Probability Functions in inductively coupled plasma with laser Thomson scattering
Author:
Publisher
IOP Publishing
Subject
Mathematical Physics,Instrumentation
Reference19 articles.
1. Measurement of the Electron Temperature by Thomson Scattering in Tokamak T3
2. Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma
3. Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
4. Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering
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1. Transmission spectrum analysis of ceramic-shielded microwave cutoff probes in low-pressure plasmas;Journal of Applied Physics;2024-06-13
2. Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges;Journal of Instrumentation;2019-12-19
3. Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas;Physics of Plasmas;2017-12
4. Two-dimensional profile measurement of plasma parameters in radio frequency-driven argon atmospheric pressure plasma jet;Physics of Plasmas;2015-09
5. Analysis of uncertainty of electron density and temperature using laser Thomson scattering in helicon plasmas;Japanese Journal of Applied Physics;2015-07-10
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