A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
Author:
Affiliation:
1. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
Funder
National Natural Science Foundation of China
Shanxi Scholarship Council of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5002156
Reference22 articles.
1. The Development of Micromachined Gyroscope Structure and Circuitry Technology
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4. The influence of nonideal factors on the capacitance permittivity in a liquid-suspended rotor micro-gyroscope
5. Vibration characteristic analysis method for the quartz microgyroscope based on the admittance circle
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