A Comparative Design Analysis of Internal and External Frame Structures for MEMS Vibrating Ring Gyroscopes
Author:
Affiliation:
1. Department of Mechanical Engineering, Curtin University, Perth, WA 6845, Australia
Publisher
MDPI
Link
https://www.mdpi.com/2673-4591/58/1/53/pdf
Reference13 articles.
1. Vibration sensitivity analysis of MEMS vibratory ring gyroscopes;Yoon;Sens. Actuators A Phys.,2011
2. Cao, H., Liu, Y., Kou, Z., Zhang, Y., Shao, X., Gao, J., Huang, K., Shi, Y., Tang, J., and Shen, C. (2019). Design, fabrication and experiment of double U-beam MEMS vibration ring gyroscope. Micromachines, 10.
3. A HARPSS polysilicon vibrating ring gyroscope;Ayazi;J. Microelectromech Syst.,2001
4. Gill, W.A., Howard, I., Mazhar, I., and McKee, K. (2022). A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments. Sensors, 22.
5. Overview and analysis of MEMS Coriolis vibratory ring gyroscope;Jia;Measurement,2021
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