Design and Modelling of MEMS Vibrating Internal Ring Gyroscopes for Harsh Environments

Abstract

This paper presents a design, model, and comparative analysis of two internal MEMS vibrating ring gyroscopes for harsh environmental conditions. The proposed design investigates the symmetric structure of the vibrating ring gyroscopes that operate at the identical shape of wine glass mode resonance frequencies for both driving and sensing purposes. This approach improves the gyroscope’s sensitivity and precision in rotational motion. The analysis starts with an investigation of the dynamic behaviour of the vibrating ring gyroscope with the detailed derivation of motion equations. The design geometry, meshing technology, and simulation results were comprehensively evaluated on two internal vibrating ring gyroscopes. The two designs are distinguished by their support spring configurations and internal ring structures. Design I consists of eight semicircular support springs and Design II consists of sixteen semicircular support springs. These designs were modelled and analyzed using finite element analysis (FEA) in Ansys 2023 R1 software. This paper further evaluates static and dynamic performance, emphasizing mode matching and temperature stability. The results reveal that Design II, with additional support springs, offers better mode matching, higher resonance frequencies, and better thermal stability compared to Design I. Additionally, electrostatic, modal, and harmonic analyses highlight the gyroscope’s behaviour under varying DC voltages and environmental conditions. Furthermore, this study investigates the impact of temperature fluctuations on performance, demonstrating the robustness of the designs within a temperature range from −100 °C to 100 °C. These research findings suggest that the internal vibrating ring gyroscopes are highly suitable for harsh conditions such as high temperature and space applications.