X‐ray study of lattice strain in boron implanted laser annealed silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328069
Reference15 articles.
1. Laser annealing of boron‐implanted silicon
2. A comparative study of laser and thermal annealing of boron‐implanted silicon
3. Unidirectional contraction in boron‐implanted laser‐annealed silicon
4. Effects of pulsed ruby‐laser annealing on As and Sb implanted silicon
5. Supersaturated substitutional alloys formed by ion implantation and pulsed laser annealing of group‐III and group‐V dopants in silicon
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