Effects of pulsed ruby‐laser annealing on As and Sb implanted silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.326366
Reference18 articles.
1. Laser annealing of boron‐implanted silicon
2. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
3. Channeling and related effects in the motion of charged particles through crystals
4. The application of high-resolution Rutherford backscattering techniques to near-surface analysis
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