Microscopic four-point atomic force microscope probe technique for local electrical conductivity measurement
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1988130
Reference20 articles.
1. Application of a novel contactless conductivity sensor in chemical vapor deposition of aluminum films
2. Contactless resistivity measurement with the high‐frequency series resonance method
3. Sensitive contactless eddy‐current conductivity measurements on Si and HgCdTe
4. Contactless measurement of electrical conductivity of semiconductor wafers using the reflection of millimeter waves
5. Measurement of the sheet resistance of resistive films on thin substrates from 120 to 175 GHz using dielectric waveguides
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