Contactless measurement of electrical conductivity of semiconductor wafers using the reflection of millimeter waves
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1520339
Reference10 articles.
1. A four-point surface conductivity probe suitable for in situ ultrahigh vacuum conductivity measurements
2. An economical ultrahigh‐vacuum probe of conductivity and mobility
3. Application of a novel contactless conductivity sensor in chemical vapor deposition of aluminum films
4. Contactless resistivity measurement with the high‐frequency series resonance method
5. Sensitive contactless eddy‐current conductivity measurements on Si and HgCdTe
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