Measurement of the sheet resistance of resistive films on thin substrates from 120 to 175 GHz using dielectric waveguides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1430534
Reference6 articles.
1. Quantitative imaging of sheet resistance with a scanning near-field microwave microscope
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3. 0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe
4. Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers
5. Technique for measuring the dielectric constant of thin materials
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