High-spatial-resolution semiconductor characterization using a microwave eddy current probe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1337639
Reference9 articles.
1. Quantitative imaging of sheet resistance with a scanning near-field microwave microscope
2. High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope
3. Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers
4. 0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe
5. Nondestructive superresolution imaging of defects and nonuniformities in metals, semiconductors, dielectrics, composites, and plants using evanescent microwaves
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Broadband Eddy Current Measurement of the Sheet Resistance of GaN Semiconductors;Sensors;2024-03-01
2. Novel Wideband Eddy Current Device for the Conductivity Measurement of Semiconductors;IEEE Sensors Journal;2016-06
3. AN IMPEDANCE-PERMEABILITY SELF-RESONANCE OF INDUCTANCE COIL WITH METAMATERIALS;Progress In Electromagnetics Research;2013
4. Modification of Nano/Micromaterials;Metallic Micro and Nano Materials;2010
5. Fabrication of a free-standing Pt micro-ring on an electrode chip as a small magnetic source;Journal of Micromechanics and Microengineering;2009-07-13
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3