Approaching intrinsic performance in ultra-thin silicon nitride drum resonators-Reference-Cited by-同舟云学术

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Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

Published:2012-09-15 Issue:6 Volume:112 Page:064323
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Adiga V. P.,Ilic B.,Barton R. A.,Wilson-Rae I.,Craighead H. G.,Parpia J. M.

Funder

Deutsche Forschungsgemeinschaft

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4754576

Reference18 articles.

1. A megahertz nanomechanical resonator with room temperature quality factor over a million

2. Cavity Optomechanics with Stoichiometric SiN Films

3. Damping of Nanomechanical Resonators

4. High quality factor resonance at room temperature with nanostrings under high tensile stress

5. High quality mechanical and optical properties of commercial silicon nitride membranes

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