Nano-beam clamping revisited

Abstract

Within recent years, the field of nano-mechanics has diversified in a variety of applications, ranging from quantum information processing to biological molecules recognition. Among the diversity of devices produced these days, the simplest (but versatile) element remains the doubly clamped beam: it can store very large tensile stresses (producing high resonance frequencies f0 and quality factors Q), is interfaceable with electric setups (by means of conductive layers), and can be produced easily in clean rooms (with scalable designs, including multiplexing). Besides, its mechanical properties are the simplest to describe. Resonance frequencies and Qs are being modeled, with as specific achievement the ultrahigh quality resonances based on “soft clamping” and “phonon shields.” Here, we demonstrate that the fabrication undercut of the clamping regions of basic nano-beams produces “natural soft clamping,” given for free. We present the analytic theory that enables to fit experimental data, which can be used for {Q,f0} design: beyond finite element modeling validation, the presented expressions provide a profound understanding of the phenomenon, with both Q enhancement and a downward frequency shift.