Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors-Reference-Cited by-同舟云学术

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Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors

Published:2023-02 Issue:1 Volume:32 Page:29-36
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Mu Gengyang¹,Snell Nikaya¹,Zhang Chang¹,Xie Xitong¹^ORCID,Tahvildari Radin²,Weck Arnaud³^ORCID,Godin Michel²,St-Gelais Raphael³^ORCID

Affiliation:

1. Department of Mechanical Engineering and the Center for Research in Photonics, University of Ottawa, Ottawa, Canada

2. Department of Physics, University of Ottawa, Ottawa, Canada

3. Department of Mechanical Engineering, Center for Research in Photonics, and the Department of Physics, University of Ottawa, Ottawa, Canada

Funder

National Science and Engineering Research Council of Canada (NSERC), Discovery Grants Program

Faculty of Engineering, University of Ottawa

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10035829/09997142.pdf?arnumber=9997142

Reference28 articles.

1. Universal transduction scheme for nanomechanical systems based on dielectric forces

2. High Q optomechanical resonators in silicon nitride nanophotonic circuits

3. Design and implementation of a bistable microcantilever actuator for magnetostatic latching relay

4. High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates

5. Nanomechanical Infrared Spectroscopy with Vibrating Filters for Pharmaceutical Analysis

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1. Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications;Advanced Materials Technologies;2023-12-14

2. Measurement of Near-Field Radiative Heat Transfer at Deep Sub-Wavelength Distances using Nanomechanical Resonators;Nano Letters;2023-09-06

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