Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Author:

Dinh Toan1ORCID,Rais‐Zadeh Mina2,Nguyen Thanh1,Phan Hoang‐Phuong3,Song Pingan1,Deo Ravinesh1,Dao Dzung4,Nguyen Nam‐Trung4,Bell John1

Affiliation:

1. University of Southern Queensland Springfield Central Queensland 4300 Australia

2. Jet Propulsion Laboratory NASA CA 91109 USA

3. University of New South Wales Sydney Sydney NSW 2052 Australia

4. Griffith University Nathan Queensland 4111 Australia

Abstract

AbstractDriving a micro and nanomechanical structure to resonance and observing its resonant motion in the physical world have led to numerous fundamental discoveries in physics, sciences, chemistry, biology, and engineering, as well as device commercialization. Scaling down mechanical structures from micrometric to nanometric size has enabled the utilization of resonant motions to probe material properties and various dynamical phenomena in quantum coherence and squeezing. Recent advances in material sciences and nanofabrication resulted in successful demonstration of ultra‐high frequency operation (GHz range) and ultra‐high quality factor (10 billion) micromachined mechanical resonators (MMRs). The resonant motion of these structures has been utilized as an indispensable tool to weigh biological and chemical species at resolution of atomic mass unit, sense a force as small as zepto‐newton, and to detect numerous other physical parameters. Here, a systematic view on the resonant sensing transduction is provided, underlying physics, and sensing structures realized with micro/nano‐electromechanical systems (MEMS/NEMS) technologies. It is also describe the roles of nanomaterials and structures, nano‐fabrication and rational designs on the resonance frequency and quality factor of MMRs toward high‐performance sensing. This paper discusses the most recent advances in the development of MMRs for material characterization as well as biological, chemical, and physical sensing. Finally, the paper discusses the challenges and perspectives on design, fabrication, and developments of resonant sensors with high quality factor toward quantum sensing, and ultra‐high sensitivity and resolution for classical sensing applications.

Funder

Australian Research Council

Publisher

Wiley

Subject

Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High-Throughput Vibrational Testing of Silicon Nanowires;2024 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS);2024-07-01

2. Acoustic Resonance Tuning by High-Order Lorentzian Mixing;Nano Letters;2024-05-13

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